Electrical, chemical and morphological characterization of tantalum nitride thin film resistors deposited at low temperature by reactive sputtering for plastic electronic applications
- Authors: A SCANDURRA; G F INDELLI; PIGNATARO B; S DI MARCO; M A DI STEFANO; S RAVESI; S PIGNATARO
- Publication year: 2007
- Type: Articolo in rivista
- OA Link: http://hdl.handle.net/10447/25086