Skip to main content
Passa alla visualizzazione normale.

ANTONINO MARTORANA

On the use of grazing incidence small angle X-ray scattering (GISAXS) in the morphological study of ion-implanted materials

  • Authors: F D'ACAPITO; C MAURIZIO; F GONELLA; E CATTARUZZA; G MATTEI; C MONDELLI; A LONGO; MARTORANA A
  • Publication year: 2004
  • Type: Articolo in rivista (Articolo in rivista)
  • OA Link: http://hdl.handle.net/10447/9426

Abstract

Grazing-incidence small-angle X-ray scattering has become a widely used technique for the morphological analysis of surface systems. Here it is show how this technique can be applied to a buried system, like metallic clusters in glass obtained by ion implantation. The optimization of the data-collection geometry is described as well as the details of the quantitative data analysis. An experimental example on Cu + Au-implanted glasses shows the potentiality of the technique.