Graded reflectivity micromirror arrays
- Authors: Cusumano, Pasquale; Lullo, Giuseppe; Mangione, Angelo; Arnone, Claudio
- Publication year: 2002
- Type: Articolo in rivista
- OA Link: http://hdl.handle.net/10447/675729
Abstract
A technique for fabricating arrays of graded reflectivity micromirrors with diameters as small as 25 μm is reported. It is based on laser-induced physical vapor deposition through microholes on a thin freestanding noncontact mask, and it is suitable for applications in micro-optics and solid-state laser technology. © 2002 Optical Society of America.