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ALESSANDRO BUSACCA

Silicon nitride-based deep sub-λ slit for ultra-broadband THz coherent detection

  • Authors: Tomasino, Alessandro; Piccoli, Riccardo; Jestin, Yoann; Busacca, Alessandro; Delprat, Sebastien; Chaker, Mohamed; Peccianti, Marco; Clerici, Matteo; Razzari, Luca; Morandotti, Roberto
  • Publication year: 2018
  • Type: Contributo in atti di convegno pubblicato in volume
  • OA Link: http://hdl.handle.net/10447/351770

Abstract

We report on the characterization of a new type of CMOS-compatible device for terahertz solid-state biased coherent detection, which relies on a 1-µm-wide metallic slit embedded in a thin film of PECVD-grown silicon nitride.