Colloidal lithography and Metal-Organic Chemical Vapor Deposition process integration to fabricate ZnO nanohole arrays
- Authors: Fragalà , M; Satriano, C; Aleeva, Y; Malandrino, G
- Publication year: 2010
- Type: Articolo in rivista (Articolo in rivista)
- Key words: ZnO; Catalyst; Nanowires; Nanohole array; Colloidal lithography; MOCVD
- OA Link: http://hdl.handle.net/10447/97154
Abstract
A complete set up of optimal process conditions for an effective colloidal lithography/catalyst assisted MOCVD process integration is presented. It mainly focuses on the determination of the deposition temperature threshold for ZnO Metal-Organic Chemical Vapour Deposition (MOCVD) as well as the concentration of metal-organic silver (Ag) catalyst. Indeed, the optimization of such process parameters allows to tailor the ZnO film morphology in order to make the colloidal lithography/catalyst assisted MOCVD approach a valuable bottom up method to fabricate bi-dimensional ordered ZnO nanohole arrays. (C) 2010 Elsevier B.V. All rights reserved.